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LEO (Zeiss) 1550

fesem

LEO (Zeiss) 1550: FEG-SEM equipped with EDS and EBSD

The LEO (Zeiss) 1550 is a high-spatial resolution SEM using a Schottky field emission (FEG) electron source, capable of resolution in 1-5 nm size range using an in-lens SED. It is used for high-resolution imaging of surfaces, qualitative assessment of the distribution of elements (by EDS), submicron structure analysis, and determination of crystal orientation and crystalline texture (by EBSD).

TECHNICAL SPECIFICATIONS

  • Accelerating voltage: 100V to 30kV
  • Detectors: 1 x In-lens secondary electron (SED), 1 x  Everhart-Thornley secondary electron (SED), 1 x Robinson-type back-scatter electron (BSED)
  • Secondary & backscattered electrons and x-rays, light (for Cathodoluminescence) and Electron Beam Induced current (EBIC)
  • Energy Dispersive X-ray Spectroscopy (EDS): Oxford INCA E2H with INCAx-act 51-1385-005 Silicon Drift detector (SDD), Energy Resolution Mn K – 133eV, detection B - U, 0.1 - 1 at%
  • HKL Nordlys II Electron Back Scatter Diffraction (EBSD) system, including a Forward Scatter Electron (FSE) detector
  • Spatial resolution
    • High-vacuum
      • 1.0nm at 20kV
      • 2.5nm at 1kV

NOTE: the effectiveness of low Accelerating voltage operation depends heavily on the nature of a sample.

Sample Images

Sample fesem01
Spherulite crystallization in an amorphous polymer melt. Image courtesy of Steve McCartney.
Sample fesem02
Porous gold formed by dealloying a silver gold mixture electrochemically and then annealing at 1073K for 15 minutes to increase the pore size. Image courtesy of Aziz Dursan and Steve McCartney.
Sample fesem03
Long-stemmed rose patterned in silicon with electron beam lithography. Rose is about 25 microns long. Image courtesy of Steve McCartney.
Sample fesem04
Cool little fractal crystals of something or other. Image courtesy Steve McCartney.