FEI Helios 600 NanoLab

fib_machineThe FEI Helios 600 NanoLab is a dual-beam workstation that combines a high-resolution SEM and a focused ion beam. It is used to dissect or deposit material at a micro- to nano-meter size scale. The instrument is capable of nanoscale lithography, deposition, and tomography, and it has a manipulator for precisely probing, straining, picking up and placing nanometer sized objects cut from or deposited on a larger samples. It is equipped with an integrated Energy Dispersive Spectrometer (EDS) and Electron Backscatter Diffration (EBSD) package for gathering chemical, spatial orientation, and strain state information. When this package is coordinated with material removal via the ion beam, it is possible to create 3-dimensional reconstructions of the internal structure, chemistry, orientation, and strain state in objects a few nanometers in size. Samples can be studied and handled from room temperature down to cryogenic temperatures.

The NCFL’s Helios 600 NanoLab is equipped with:

  • an Omniprobe 200.2
  • a 3-nozzle gas injection system with gases for platinum deposition, insulaotor enhanced etching, and selective carbon milling – automated focussed-ion beam milling
  • a TEM sample preparation kit
  • a STEM detector
  • Pegasus XM 4 Integrated EDS and EBSD (Genesis EDS x-ray microanalysis system and Hikari camera for EBSD) with integrated 3D OIM automated data aquisition and batch processing software
  • Evactron plasma cleaner and cryo-can
  • a lithography package (for electron- or ion-beam lithography) with an electrostatic beam blanker and Nabity pattern generation system
  • a Quorum cryo-transfer system
  • Amira software license
  • a 52-pin electrical feedthrough for custom experiments

Detailed specifications

Sample Images